Invention Grant
- Patent Title: Seal ring support for backside illuminated image sensor
- Patent Title (中): 背面照明图像传感器的密封环支撑
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Application No.: US12986032Application Date: 2011-01-06
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Publication No.: US08373243B2Publication Date: 2013-02-12
- Inventor: Hsin-Chih Tai , Vincent Venezia , Yin Qian , Duli Mao , Keh-Chiang Ku
- Applicant: Hsin-Chih Tai , Vincent Venezia , Yin Qian , Duli Mao , Keh-Chiang Ku
- Applicant Address: US CA Santa Clara
- Assignee: OmniVision Technologies, Inc.
- Current Assignee: OmniVision Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely Sokoloff Taylor & Zafman LLP
- Main IPC: H01L31/12
- IPC: H01L31/12

Abstract:
A backside illuminated imaging sensor with a seal ring support includes an epitaxial layer having an imaging array formed in a front side of the epitaxial layer. A metal stack is coupled to the front side of the epitaxial layer, wherein the metal stack includes a seal ring formed in an edge region of the imaging sensor. An opening is included that extends from the back side of the epitaxial layer to a metal pad of the seal ring to expose the metal pad. The seal ring support is disposed on the metal pad and within the opening to structurally support the seal ring.
Public/Granted literature
- US20120175722A1 SEAL RING SUPPORT FOR BACKSIDE ILLUMINATED IMAGE SENSOR Public/Granted day:2012-07-12
Information query
IPC分类: