Invention Grant
US08373252B1 Integrated circuit having capacitor on back surface 有权
集成电路在背面具有电容器

  • Patent Title: Integrated circuit having capacitor on back surface
  • Patent Title (中): 集成电路在背面具有电容器
  • Application No.: US13042132
    Application Date: 2011-03-07
  • Publication No.: US08373252B1
    Publication Date: 2013-02-12
  • Inventor: Andrew J. DeBaets
  • Applicant: Andrew J. DeBaets
  • Applicant Address: US CA San Jose
  • Assignee: Xilinx, Inc.
  • Current Assignee: Xilinx, Inc.
  • Current Assignee Address: US CA San Jose
  • Agent LeRoy D. Maunu; Lois D. Cartier
  • Main IPC: H01L21/02
  • IPC: H01L21/02
Integrated circuit having capacitor on back surface
Abstract:
An integrated circuit with capacitor structures includes a substrate and a plurality of vias extending from a front surface to a back surface of the substrate. A plurality of transistors is disposed at the front surface of the substrate and has first and second pluralities of electrodes. A patterned metal layer on the front surface of the semiconductor substrate provides first and second networks. The first network couples the first plurality of electrodes to a first via, and the second network couples the second plurality of electrodes to a second via. A dielectric layer separates first and second patterned metal layers on the back surface of the substrate. The first patterned metal layer includes a first metal plate coupled to the first via, and the second patterned metal layer includes a second metal plate coupled to the second via, forming a capacitor with the dielectric layer.
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