Invention Grant
- Patent Title: Integrated circuit having capacitor on back surface
- Patent Title (中): 集成电路在背面具有电容器
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Application No.: US13042132Application Date: 2011-03-07
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Publication No.: US08373252B1Publication Date: 2013-02-12
- Inventor: Andrew J. DeBaets
- Applicant: Andrew J. DeBaets
- Applicant Address: US CA San Jose
- Assignee: Xilinx, Inc.
- Current Assignee: Xilinx, Inc.
- Current Assignee Address: US CA San Jose
- Agent LeRoy D. Maunu; Lois D. Cartier
- Main IPC: H01L21/02
- IPC: H01L21/02

Abstract:
An integrated circuit with capacitor structures includes a substrate and a plurality of vias extending from a front surface to a back surface of the substrate. A plurality of transistors is disposed at the front surface of the substrate and has first and second pluralities of electrodes. A patterned metal layer on the front surface of the semiconductor substrate provides first and second networks. The first network couples the first plurality of electrodes to a first via, and the second network couples the second plurality of electrodes to a second via. A dielectric layer separates first and second patterned metal layers on the back surface of the substrate. The first patterned metal layer includes a first metal plate coupled to the first via, and the second patterned metal layer includes a second metal plate coupled to the second via, forming a capacitor with the dielectric layer.
Information query
IPC分类: