Invention Grant
- Patent Title: Device under bonding pad using single metallization
- Patent Title (中): 在焊接垫下使用单一金属化的器件
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Application No.: US12582690Application Date: 2009-10-20
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Publication No.: US08373272B2Publication Date: 2013-02-12
- Inventor: Chi Kang Liu , Talee Yu
- Applicant: Chi Kang Liu , Talee Yu
- Applicant Address: CN Shanghai
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
- Current Assignee Address: CN Shanghai
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: CN200910056526 20090813
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
An integrated circuit device comprising an improved bonding pad structure. The device has a semiconductor substrate. A plurality of active MOS devices are formed on the semiconductor substrate. The device has an interlayer dielectric layer overlying the plurality of active MOS devices and at least one single metal bonding pad formed on the interlayer dielectric layer and directly over at least one of the active devices. At least four edge regions are formed on a square shape of the at least one single metal bonding pad. An angled cut region is formed on each of the four edge regions. The device has a buffer metal layer free region located between the plurality of active MOS devices and the at least one single metal bonding pad. The buffer metal layer free region does not have a buffer metal layer in the interlayer dielectric layer.
Public/Granted literature
- US20110037177A1 DEVICE UNDER BONDING PAD USING SINGLE METALLIZATION Public/Granted day:2011-02-17
Information query
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