Invention Grant
US08373425B2 Plasma insensitive height sensing 有权
等离子体不敏感的高度感测

Plasma insensitive height sensing
Abstract:
A method for determining a distance between a first piece and a second piece includes measuring, at the first or second piece, an AC signal, and determining the distance based on the measured AC signal. A system for determining a distance between a first piece and a second piece includes a measuring device adapted to measure, at one or both of the first and second piece, an AC signal, and a signal processing device adapted to determine the distance based on the measured AC signal. The AC signal includes a DC offset.
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