Invention Grant
- Patent Title: Probe for scanning over a substrate and data storage device
- Patent Title (中): 用于扫描基板和数据存储设备的探头
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Application No.: US12054938Application Date: 2008-03-25
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Publication No.: US08373431B2Publication Date: 2013-02-12
- Inventor: Thomas Albrecht , Michel Despont , Urs T. Duerig , Mark Lantz , Hugo E. Rothuizen , Dorothea W. Wiesmann Rothuizen
- Applicant: Thomas Albrecht , Michel Despont , Urs T. Duerig , Mark Lantz , Hugo E. Rothuizen , Dorothea W. Wiesmann Rothuizen
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Main IPC: G01R31/02
- IPC: G01R31/02 ; G01R31/28

Abstract:
A data storage device comprises a storage medium for storing data in the form of marks and at least one probe for scanning the storage medium. The storage medium may be comprised in a substrate. The probe comprises a cantilever that comprises terminals serving as electrical contacts an being during operation of the probe mechanically fixed to a probe-holding structure, which may be a common frame of the data storage device. A probe further comprises a supporting structure, to which the terminals are mechanically directly coupled or coupled via hinges and which extends away from the terminals. A tip with a nanoscale apex is provided. A beam structure comprises a heating resistor and is attached at ends to the supporting structure. The beam structure is thinned at least in a direction parallel to an axis of the tip compared to an area of the supporting structure abutting the beam structure.
Public/Granted literature
- US20090003188A1 PROBE FOR SCANNING OVER A SUBSTRATE AND DATA STORAGE DEVICE Public/Granted day:2009-01-01
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