Invention Grant
- Patent Title: System, method and apparatus for calibrating inspection tools
- Patent Title (中): 用于校准检查工具的系统，方法和装置
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Application No.: US12643864Application Date: 2009-12-21
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Publication No.: US08374818B2Publication Date: 2013-02-12
- Inventor: Peter Meijles
- Applicant: Peter Meijles
- Applicant Address: US CA Santa Clara
- Assignee: Affymetrix, Inc.
- Current Assignee: Affymetrix, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Affymetrix, Inc.
- Main IPC: G01C17/38
- IPC: G01C17/38
Abstract:
The present invention relates to systems and methods for examining a number of components that have been assembled onto a substrate. In general, the invention relates to the calibration of inspection tools for inspecting components on the substrate. In particular, the invention relates to the calibration of inspection tools for detecting the accuracy of the array pegs positions on an assembled HTA plate.
Public/Granted literature
- US20100161266A1 SYSTEM, METHOD AND PRODUCT FOR CALIBRATING INSPECTION TOOLS Public/Granted day:2010-06-24
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