A test substrate manufacturing apparatus comprising a test circuit database that stores circuit data of a plurality of types of test circuits in association with a plurality of types of testing content; a definition information storing section that stores definition information defining arrangements of device pads of devices under test and testing content to be performed for each of the device pads; and a lithography data generating section that generates lithography data for the test substrate by (i) selecting, from the test circuit database, circuit data of each test circuit to be connected to a device pad based on the testing content defined by the definition information stored in the definition information storing section and (ii) determining positions on the test substrate where the test circuits corresponding to the selected circuit data are formed using lithography, based on the arrangements of the device pads as defined by the definition information.