Invention Grant
US08375787B2 Rotation rate sensor and method for operating a rotation rate sensor
有权
旋转速率传感器和操作旋转速度传感器的方法
- Patent Title: Rotation rate sensor and method for operating a rotation rate sensor
- Patent Title (中): 旋转速率传感器和操作旋转速度传感器的方法
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Application No.: US12637171Application Date: 2009-12-14
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Publication No.: US08375787B2Publication Date: 2013-02-19
- Inventor: Robert Sattler , Daniel Christoph Meisel , Joerg Hauer
- Applicant: Robert Sattler , Daniel Christoph Meisel , Joerg Hauer
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102008054749 20081216
- Main IPC: G01C19/56
- IPC: G01C19/56

Abstract:
A rotation rate sensor includes a substrate having a main extension plane, and a Coriolis element movable relative to the substrate, the Coriolis element being provided to be excitable to perform an oscillation deflection substantially parallel to the main extension plane; and the Coriolis element further being provided to be deflectable, by way of a Coriolis force acting on the Coriolis element, to perform a detectable Coriolis deflection perpendicular to the main extension plane; and the rotation rate sensor further including at least one compensation electrode that is provided for at least partial compensation, as a function of the oscillation deflection, for a levitation force acting on the Coriolis element.
Public/Granted literature
- US20100186505A1 ROTATION RATE SENSOR AND METHOD FOR OPERATING A ROTATION RATE SENSOR Public/Granted day:2010-07-29
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