Invention Grant
US08375789B2 Microelectromechanical gyroscope with position control driving and method for controlling a microelectromechanical gyroscope 有权
具有位置控制驱动的微机电陀螺仪和微机电陀螺仪控制方法

Microelectromechanical gyroscope with position control driving and method for controlling a microelectromechanical gyroscope
Abstract:
A MEMS gyroscope includes: a microstructure having a fixed structure, a driving mass, movable with respect to the fixed structure according to a driving axis, and a sensing mass, mechanically coupled to the driving mass so as to be drawn in motion according to the driving axis and movable with respect to the driving mass according to a sensing axis, in response to rotations of the microstructure; and a driving device, for keeping the driving mass in oscillation with a driving frequency. The driving device includes a discrete-time sensing interface, for detecting a position of the driving mass with respect to the driving axis and a control stage for controlling the driving frequency on the basis of the position of the driving mass.
Information query
Patent Agency Ranking
0/0