Invention Grant
- Patent Title: Apparatus for forming films on substrates
- Patent Title (中): 用于在基片上形成薄膜的装置
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Application No.: US12599061Application Date: 2007-05-07
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Publication No.: US08375888B2Publication Date: 2013-02-19
- Inventor: Stephen Mark Lambert , Dennis Mullins , Cuong Manh Ta , Peter Wing Leung
- Applicant: Stephen Mark Lambert , Dennis Mullins , Cuong Manh Ta , Peter Wing Leung
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- International Application: PCT/US2007/068375 WO 20070507
- International Announcement: WO2008/136833 WO 20081113
- Main IPC: B05C11/04
- IPC: B05C11/04
Abstract:
A doctor blade assembly for use in combination with apparatus for forming a film on a substrate. The doctor blade assembly includes a doctor blade to be mounted on a programmable robot. The doctor blade has a bottom face and spacers at opposite ends of the body of the doctor blade extending a predetermined distance down below the bottom face of the body for contacting a substrate and spacing the bottom face from the substrate. The spacers are adjustable relative to the doctor blade for adjusting the predetermined distance according to the thickness of film to be formed on the substrate. Other aspects and methods are also disclosed.
Public/Granted literature
- US20100221439A1 APPARATUS FOR FORMING FILMS ON SUBSTRATES Public/Granted day:2010-09-02
Information query
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