Invention Grant
- Patent Title: Flow restrictor
- Patent Title (中): 流量限制器
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Application No.: US11932429Application Date: 2007-10-31
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Publication No.: US08376312B2Publication Date: 2013-02-19
- Inventor: Daniel T Mudd , William W White , Virginia Miller , Christopher Davis , Kimura Miyoshi , Tadahiro Yasuda
- Applicant: Daniel T Mudd , William W White , Virginia Miller , Christopher Davis , Kimura Miyoshi , Tadahiro Yasuda
- Applicant Address: JP Kyoto
- Assignee: Horiba, Ltd.
- Current Assignee: Horiba, Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Sughrue Mion, PLLC
- Main IPC: F16L55/027
- IPC: F16L55/027

Abstract:
A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together.A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.
Public/Granted literature
- US20080041481A1 FLOW RESTRICTOR Public/Granted day:2008-02-21
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