Invention Grant
US08376312B2 Flow restrictor 有权
流量限制器

Flow restrictor
Abstract:
A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together.A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.
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