Invention Grant
- Patent Title: Integrated gripper for workpiece transfer
- Patent Title (中): 集成夹具用于工件传送
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Application No.: US11881088Application Date: 2007-07-25
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Publication No.: US08376428B2Publication Date: 2013-02-19
- Inventor: Lutz Rebstock
- Applicant: Lutz Rebstock
- Applicant Address: DE Radofzell
- Assignee: Dynamic Micro System Semiconductor Equipment GmbH
- Current Assignee: Dynamic Micro System Semiconductor Equipment GmbH
- Current Assignee Address: DE Radofzell
- Agent Tue Nguyen
- Main IPC: B65H1/00
- IPC: B65H1/00 ; G06F19/00

Abstract:
An integrated grip arm comprises a plurality of grippers to accommodate a plurality of reticles and carrier boxes without the need of separate arm or gripper changes. The integrated grip arm can comprise an edge gripper for gripping a reticle or a carrier box at the edges, and a fork gripper for gripping a reticle or a carrier box at a top and a bottom portions. The integrated grip arm can comprise an edge gripper for gripping a wafer from the edges and an end effector for holding a wafer from the bottom. The integrated grip arm can comprise a vertical gripper for gripping a workpiece from a vertical position and a horizontal gripper for gripping a workpiece from a horizontal position.
Public/Granted literature
- US20080131239A1 Integrated gripper for workpiece transfer Public/Granted day:2008-06-05
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