Invention Grant
US08376512B2 Droplet discharge device and method for controlling droplet discharge device 有权
液滴排放装置及控制液滴排放装置的方法

Droplet discharge device and method for controlling droplet discharge device
Abstract:
A droplet discharge device is adapted to perform drawing of droplets of functional liquid from a functional droplet discharge head onto a workpiece in a drawing area, and to perform discharge inspection of the functional droplet discharge head in an inspection area, which is separated from the drawing area. The droplet discharge device includes a positioning stage, a flushing unit and an inspection stage disposed in this order along a common movement axis passing through the drawing area and the inspection area so that the inspection stage is disposed at a position closer to the inspection area. An image recognition device is disposed in the inspection area. A movement mechanism is arranged to move the positioning stage, the flushing unit and the inspection stage along the common movement axis. The movement mechanism is arranged to move the inspection stage independently of the positioning stage and the flushing unit.
Information query
Patent Agency Ranking
0/0