Invention Grant
- Patent Title: Retaining ring and articles for carrier head
- Patent Title (中): 用于承载头的保持环和物品
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Application No.: US12703591Application Date: 2010-02-10
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Publication No.: US08376813B2Publication Date: 2013-02-19
- Inventor: Doyle E. Bennett , Andrew J. Nagengast , Hung Chih Chen
- Applicant: Doyle E. Bennett , Andrew J. Nagengast , Hung Chih Chen
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: B24B47/26
- IPC: B24B47/26
Abstract:
A carrier head for chemical mechanical polishing that has a base, a mounting assembly connected to the base having a surface for contacting a substrate, and a retaining ring secured to the base. The retaining ring can include perfluoroalkoxy, polyetherketoneketone, polybenzimidazole, a semi-crystalline thermoplastic polyester, or a long molecular chain molecule produced from poly-paraphenylene terephthalamide.
Public/Granted literature
- US20100144255A1 RETAINING RING AND ARTICLES FOR CARRIER HEAD Public/Granted day:2010-06-10
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