Invention Grant
US08377212B2 Chamber, device and method for annealing a semi-conductor material of II-VI type
有权
II-VI型半导体材料退火室,器件及方法
- Patent Title: Chamber, device and method for annealing a semi-conductor material of II-VI type
- Patent Title (中): II-VI型半导体材料退火室,器件及方法
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Application No.: US12788650Application Date: 2010-05-27
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Publication No.: US08377212B2Publication Date: 2013-02-19
- Inventor: Laurent Mollard , Guillaume Bourgeois , Franck Henry , Bernard Pelliciari
- Applicant: Laurent Mollard , Guillaume Bourgeois , Franck Henry , Bernard Pelliciari
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives
- Current Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives
- Current Assignee Address: FR Paris
- Agency: Oliff & Berridge, PLC
- Priority: FR0902560 20090527
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23C16/455 ; C23C16/448 ; C23C16/46

Abstract:
A chamber for annealing a semi-conductor material of II-VI type having a first area for storing an element of group II of the periodic table and a second area designed to receive the semi-conductor material of II-VI type. The chamber s equipped with a separating partition at the level of an intermediate area. This separating partition is provided with a passage aperture equipped with gas anti-reverse flow means to ensure one-way passage of the element of group II of the periodic table, in vapor phase, from the first area to the second area. This chamber is heated by heating means enabling the two areas to be heated independently.
Public/Granted literature
- US20100304576A1 CHAMBER, DEVICE AND METHOD FOR ANNEALING A SEMI-CONDUCTOR MATERIAL OF II-VI TYPE Public/Granted day:2010-12-02
Information query
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