Invention Grant
US08377736B2 System and method for transferring substrates in large scale processing of CIGS and/or CIS devices 失效
用于在CIGS和/或CIS设备的大规模处理中传送衬底的系统和方法

System and method for transferring substrates in large scale processing of CIGS and/or CIS devices
Abstract:
The present invention provides methods for fabricating a copper indium diselenide semiconductor film. The method includes providing a plurality of substrates having a copper and indium composite structure, and including a peripheral region, the peripheral region including a plurality of openings, the plurality of openings including at least a first opening and a second opening. The method includes transferring the plurality of substrates into a furnace, each of the plurality of substrates provided in a vertical orientation with respect to a direction of gravity, the furnace including a holding apparatus. The method further includes introducing a gaseous species into the furnace and transferring thermal energy into the furnace to increase a temperature from a first temperature to at least initiate formation of a copper indium diselenide film on each of the substrates.
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