Invention Grant
US08378252B2 Method and apparatus for hybrid resolution feedback of a motion stage
失效
运动舞台混合分辨率反馈的方法和装置
- Patent Title: Method and apparatus for hybrid resolution feedback of a motion stage
- Patent Title (中): 运动舞台混合分辨率反馈的方法和装置
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Application No.: US12788583Application Date: 2010-05-27
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Publication No.: US08378252B2Publication Date: 2013-02-19
- Inventor: Mehmet Ermin Alpay
- Applicant: Mehmet Ermin Alpay
- Applicant Address: US OR Portland
- Assignee: Electro Scientific Industries, Inc.
- Current Assignee: Electro Scientific Industries, Inc.
- Current Assignee Address: US OR Portland
- Main IPC: G02F1/01
- IPC: G02F1/01 ; B23K26/36 ; B23K26/00
Abstract:
A method and apparatus is presented for obtaining high resolution positional feedback from motion stages 52 in indexing systems 10 without incurring the costs associated with providing high resolution positional feedback from the entire range of motion by combining low resolution/low cost feedback devices 72 with high resolution/high cost feedback devices 74, 76, 78, 80, 82, 84, 86, 88.
Public/Granted literature
- US20100301028A1 METHOD AND APPARATUS FOR HYBRID RESOLUTION FEEDBACK OF A MOTION STAGE Public/Granted day:2010-12-02
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