Invention Grant
- Patent Title: Photodetector isolation in image sensors
- Patent Title (中): 图像传感器中的光电检测器隔离
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Application No.: US12966224Application Date: 2010-12-13
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Publication No.: US08378398B2Publication Date: 2013-02-19
- Inventor: Hung Q. Doan , Eric G. Stevens , Robert M. Guidash
- Applicant: Hung Q. Doan , Eric G. Stevens , Robert M. Guidash
- Applicant Address: US CA Santa Clara
- Assignee: OmniVision Technologies, Inc.
- Current Assignee: OmniVision Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely Sokoloff Taylor & Zafman LLP
- Main IPC: H01L31/062
- IPC: H01L31/062 ; H01L31/113

Abstract:
Shallow trench isolation regions are disposed in an n-type silicon semiconductor layer laterally adjacent to a collection region of a photodetector and laterally adjacent to a charge-to-voltage conversion region. The shallow trench isolation regions each include a trench disposed in the silicon semiconductor layer and a first dielectric structure disposed along an interior bottom and sidewalls of each trench. A second dielectric structure is disposed over the pinning layer. The dielectric structures include a silicon nitride layer disposed over an oxide layer. An n-type isolation layer is disposed along only a portion of the exterior bottom of the trench and the exterior sidewall of the trench immediately adjacent to the photodetector. The n-type isolation layer is not disposed along the remaining portion of the bottom or the opposing exterior sidewall of the trench.
Public/Granted literature
- US20120080733A1 PHOTODETECTOR ISOLATION IN IMAGE SENSORS Public/Granted day:2012-04-05
Information query
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