Invention Grant
- Patent Title: Backside illumination solid-state imaging device
- Patent Title (中): 背面照明固态成像装置
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Application No.: US13181711Application Date: 2011-07-13
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Publication No.: US08378399B2Publication Date: 2013-02-19
- Inventor: Motohiro Maeda
- Applicant: Motohiro Maeda
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2010-160012 20100714
- Main IPC: H01L31/062
- IPC: H01L31/062 ; H01L31/113

Abstract:
According to one embodiment, a backside illumination solid-state imaging device includes a semiconductor layer, a first light-receiving unit and a second light-receiving unit, a circuit unit, an impurity isolation layer, and a light-shielding film. A first light-receiving unit and a second light-receiving unit are formed adjacent to each other in the semiconductor layer, convert light applied from a lower surface side of the semiconductor layer into a signal, and store electric charges. A circuit unit is formed on an upper surface of the semiconductor layer. An impurity isolation layer is formed to reach to the upper surface from the lower surface in the semiconductor layer and isolates the first light-receiving unit from the second light-receiving unit. A light-shielding film is formed on part of the lower surface side in the impurity isolation layer so as to extend from the lower surface to the upper surface.
Public/Granted literature
- US20120012965A1 BACKSIDE ILLUMINATION SOLID-STATE IMAGING DEVICE Public/Granted day:2012-01-19
Information query
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