Invention Grant
- Patent Title: Semiconductor storage device
- Patent Title (中): 半导体存储设备
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Application No.: US12699647Application Date: 2010-02-03
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Publication No.: US08378425B2Publication Date: 2013-02-19
- Inventor: Fujio Masuoka , Shintaro Arai
- Applicant: Fujio Masuoka , Shintaro Arai
- Applicant Address: SG Peninsula Plaza
- Assignee: Unisantis Electronics Singapore Pte Ltd.
- Current Assignee: Unisantis Electronics Singapore Pte Ltd.
- Current Assignee Address: SG Peninsula Plaza
- Agency: Brinks Hofer Gilson & Lione
- Priority: WOPCT/JP2008/051301 20080129
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L21/8244

Abstract:
It is intended to achieve a sufficiently-small SRAM cell area and a stable operation margin in a CMOS 6T-SRAM comprising a vertical transistor SGT. In a static type memory cell made up using six MOS transistors, each of the MOS transistor constituting the memory cell is formed on a planar silicon layer formed on a buried oxide film, to have a structure where a drain, a gate and a source are arranged in a vertical direction, wherein the gate is formed to surround a pillar-shaped semiconductor layer. The planar silicon layer comprises a first active region having a first conductive type, and a second active region having a second conductive type. The first and second active regions are connected to each other through a silicide layer formed in a surface of the planar silicon layer to achieve an SRAM cell having a sufficiently-small area.
Public/Granted literature
- US20100219483A1 SEMICONDUCTOR STORAGE DEVICE Public/Granted day:2010-09-02
Information query
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