Invention Grant
- Patent Title: Semiconductor memory device and fabrication process thereof
- Patent Title (中): 半导体存储器件及其制造工艺
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Application No.: US12068692Application Date: 2008-02-11
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Publication No.: US08378426B2Publication Date: 2013-02-19
- Inventor: Makoto Yasuda
- Applicant: Makoto Yasuda
- Applicant Address: JP Yokohama
- Assignee: Fujitsu Semiconductor Limited
- Current Assignee: Fujitsu Semiconductor Limited
- Current Assignee Address: JP Yokohama
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2007-042498 20070222
- Main IPC: H01L21/70
- IPC: H01L21/70

Abstract:
A SRAM includes a first CMOS inverter of first and second MOS transistors connected in series, a second CMOS inverter of third and fourth MOS transistors connected in series and forming a flip-flop circuit together with the first CMOS inverter, and a polysilicon resistance element formed on a device isolation region, each of the first and third MOS transistors is formed in a device region of a first conductivity type and includes a second conductivity type drain region at an outer side of a sidewall insulation film of the gate electrode with a larger depth than a drain extension region thereof, wherein a source region is formed deeper than a drain extension region, the polysilicon gate electrode has a film thickness identical to a film thickness of the polysilicon resistance element, the source region and the polysilicon resistance element are doped with the same dopant element.
Public/Granted literature
- US20080203493A1 Semiconductor memory device and fabrication process thereof Public/Granted day:2008-08-28
Information query
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