Invention Grant
- Patent Title: Ion beam generator
- Patent Title (中): 离子束发生器
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Application No.: US12897400Application Date: 2010-10-04
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Publication No.: US08378576B2Publication Date: 2013-02-19
- Inventor: Einstein Noel Abarra , Yasushi Miura , Eiji Fujiyama , Naoyuki Suzuki , Yasuyuki Taneda , Yasushi Kamiya
- Applicant: Einstein Noel Abarra , Yasushi Miura , Eiji Fujiyama , Naoyuki Suzuki , Yasuyuki Taneda , Yasushi Kamiya
- Applicant Address: JP Kawasaki-shi
- Assignee: Canon Anelva Corporation
- Current Assignee: Canon Anelva Corporation
- Current Assignee Address: JP Kawasaki-shi
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2009-284129 20091215
- Main IPC: H05B31/26
- IPC: H05B31/26
Abstract:
[Objection of the invention]An ion beam generator, a thermal distortion in a grid assembly is reduced. [Structure to solve the objection]Thermal expansion coefficients αP, αM and αG, for a sidewall (1A) of a discharge chamber, mounting platform (40) and extraction grid electrode assembly (20) are selected to have a relation: αP>αM≧αG. For example, the material of discharge chamber sidewall is stainless steel o aluminum, the material of grids is Mo, W or C and the material of platform is Ti or Mo.
Public/Granted literature
- US20110139998A1 ION BEAM GENERATOR Public/Granted day:2011-06-16
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