Invention Grant
- Patent Title: Method for providing alignment of a probe
- Patent Title (中): 提供探针对准的方法
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Application No.: US13072621Application Date: 2011-03-25
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Publication No.: US08378697B2Publication Date: 2013-02-19
- Inventor: Peter Folmer Nielsen , Peter R. E. Petersen , Jesper Erdman Hansen
- Applicant: Peter Folmer Nielsen , Peter R. E. Petersen , Jesper Erdman Hansen
- Applicant Address: DK Lyngby
- Assignee: Capres A/S
- Current Assignee: Capres A/S
- Current Assignee Address: DK Lyngby
- Agency: Klein, O'Neill & Singh, LLP
- Priority: EP04388039 20040621; EP04388065 20040928; EP05388003 20050127
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R31/20

Abstract:
A method for aligning a probe relative to a supporting substrate defining a first planar surface, an edge, and a first crystal plane includes the steps of masking the surface of the substrate to define an exposed area on the first surface at the edge; and etching, using an etch reagent, a recess in the exposed area, the recess defining first and second opposed sidewalls, an end wall remote from the edge, and a bottom wall. The method further includes the step of providing a probe substrate defining a second planar surface and a second crystal plane identical to the first crystal plane, and positioning the probe substrate so that the first and the second crystal planes are positioned identically when forming a probe from the probe substrate using the etch reagent, wherein the probe defines congruent surfaces to the first and second sidewalls.
Public/Granted literature
- US20110169515A1 METHOD FOR PROVIDING ALIGNMENT OF A PROBE Public/Granted day:2011-07-14
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