Invention Grant
- Patent Title: Wiring substrate and probe card
- Patent Title (中): 接线基板和探针卡
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Application No.: US12735929Application Date: 2009-02-26
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Publication No.: US08378705B2Publication Date: 2013-02-19
- Inventor: Toshio Kazama , Hiroshi Nakayama , Shinya Miyaji , Kohei Suzuki
- Applicant: Toshio Kazama , Hiroshi Nakayama , Shinya Miyaji , Kohei Suzuki
- Applicant Address: JP Yokohama-shi
- Assignee: NHK Spring Co., Ltd.
- Current Assignee: NHK Spring Co., Ltd.
- Current Assignee Address: JP Yokohama-shi
- Agency: Edwards Wildman Palmer LLP
- Priority: JP2008-050888 20080229
- International Application: PCT/JP2009/053602 WO 20090226
- International Announcement: WO2009/107747 WO 20090903
- Main IPC: G01R31/00
- IPC: G01R31/00

Abstract:
A wiring substrate that allows wiring at a fine pitch and has a coefficient of thermal expansion close to the coefficient of thermal expansion of silicone, and a probe card that includes the wiring substrate are provided. To this end, there are provided a wiring substrate that includes a ceramic substrate having a coefficient of thermal expansion of 3×10−6 to 5×10−6/° C. and one or more thin-film wiring sheets stacked on one surface of the ceramic substrate, and a probe head on which a plurality of conductive proves are arranged in accordance with wiring on the thin-film wiring sheet, which holds individual probes while preventing the probes from coming off and allowing both ends of each probe to be exposed, and which is stacked on the wiring substrate while one end of each probe is brought into contact with the thin-film wiring sheet.
Public/Granted literature
- US20100327897A1 WIRING SUBSTRATE AND PROBE CARD Public/Granted day:2010-12-30
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