Invention Grant
US08379082B2 System, methods and apparatus for substrate carrier content verification using a material handling system
有权
使用材料处理系统进行基板载体内容验证的系统，方法和装置
- Patent Title: System, methods and apparatus for substrate carrier content verification using a material handling system
- Patent Title (中): 使用材料处理系统进行基板载体内容验证的系统，方法和装置
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Application No.: US12398178Application Date: 2009-03-04
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Publication No.: US08379082B2Publication Date: 2013-02-19
- Inventor: Vinay K. Shah , Sushant S. Koshti , Eric A. Englhardt
- Applicant: Vinay K. Shah , Sushant S. Koshti , Eric A. Englhardt
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan, PC
- Main IPC: H04N7/18
- IPC: H04N7/18 ; G06K9/00
Abstract:
Methods and systems are provided for mapping substrates in a substrate carrier. The invention includes a substrate carrier including one or more windows; and an imaging system coupled to a substrate carrier handling robot and adapted to determine or image substrate positions in the substrate carrier via the one or more windows. Numerous other aspects are provided.
Public/Granted literature
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