Invention Grant
- Patent Title: Optical system
- Patent Title (中): 光学系统
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Application No.: US12782831Application Date: 2010-05-19
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Publication No.: US08379188B2Publication Date: 2013-02-19
- Inventor: Ralf Mueller , Toralf Gruner
- Applicant: Ralf Mueller , Toralf Gruner
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102007055567 20071120
- Main IPC: G03B27/72
- IPC: G03B27/72 ; G03B27/54

Abstract:
The disclosure provides an optical system having an optical axis, where the optical system includes a polarization manipulator which includes first and second subelements. The first subelement has a non-planar, optically effective surface. For light passing through the first subelement, the first subelement causes a change in the polarization state. A maximum effective retardation introduced by the first subelement along the optical axis is less than a quarter of the working wavelength of the optical system. The first subelement and the second subelement have mutually facing surfaces which are mutually complementary. The optical system also includes a position manipulator to manipulate the relative position of the first and second subelements.
Public/Granted literature
- US20100231888A1 OPTICAL SYSTEM Public/Granted day:2010-09-16
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