Invention Grant
US08379222B2 Fizeau interferometer and measurement method using Fizeau interferometer
有权
Fizeau干涉仪和使用Fizeau干涉仪的测量方法
- Patent Title: Fizeau interferometer and measurement method using Fizeau interferometer
- Patent Title (中): Fizeau干涉仪和使用Fizeau干涉仪的测量方法
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Application No.: US12962783Application Date: 2010-12-08
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Publication No.: US08379222B2Publication Date: 2013-02-19
- Inventor: Takeshi Hagino , Yuichiro Yokoyama , Yutaka Kuriyama
- Applicant: Takeshi Hagino , Yuichiro Yokoyama , Yutaka Kuriyama
- Applicant Address: JP Kawasaki
- Assignee: Mitutoyo Corporation
- Current Assignee: Mitutoyo Corporation
- Current Assignee Address: JP Kawasaki
- Agency: Rankin, Hill & Clark LLP
- Priority: JP2009-278218 20091208
- Main IPC: G01B11/02
- IPC: G01B11/02

Abstract:
A Fizeau interferometer includes: a reference spherical surface; and a measuring apparatus including an intensity obtaining section and a form calculating section, wherein: a focal point of the reference spherical surface is aligned with a center of curvature of the spherical surface in order to set the center of curvature as a center position, and two positions equidistant from the center position are set as a start position and an end position, the intensity obtaining section obtains the intensity maps of the interferograms at n positions at equal intervals; and the form calculating section measures the form of the spherical surface using a phase analysis method in which a coefficient of the intensity maps of the interferograms at an i-th position and a coefficient of the intensity maps of the interferograms at an (n−i+1)th position have a same value.
Public/Granted literature
- US20110134437A1 FIZEAU INTERFEROMETER AND MEASUREMENT METHOD USING FIZEAU INTERFEROMETER Public/Granted day:2011-06-09
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