Invention Grant
- Patent Title: Apparatus for measuring thin film refractive index and thickness with a spectrophotometer
- Patent Title (中): 用分光光度计测量薄膜折射率和厚度的装置
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Application No.: US12931890Application Date: 2011-02-14
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Publication No.: US08379228B1Publication Date: 2013-02-19
- Inventor: Alan Douglas Streater
- Applicant: Alan Douglas Streater
- Main IPC: G01B11/28
- IPC: G01B11/28

Abstract:
A device is provided that can be inserted into a spectrophotometer, in order to measure the thickness and refractive index of a thin film that is on a sample plate. A pair of identical parallelogram prisms diverts the spectrophotometer beam to measure the attenuated total reflection, and returns an output beam that is in the original beam path, independent of wavelength and rotation angle. The attenuated total reflection of the thin film sample plate is measured in a prism coupling geometry, as a function of wavelength and angle. From this data, combined with normal incidence transmission data, the thickness and refractive index can be extracted.
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