Invention Grant
US08379283B2 Micromechanical element and sensor for monitoring a micromechanical element 有权
用于监测微机械元件的微机械元件和传感器

Micromechanical element and sensor for monitoring a micromechanical element
Abstract:
A micromechanical element includes a movable functional element, a first retaining element, a second retaining element, a third retaining element, and a fourth retaining element. The first retaining element and the functional element are connected at a first junction, the second retaining element and the functional element are connected at a second junction, the third retaining element and the functional element are connected at a third junction, and the fourth retaining element and the functional element are connected at a fourth junction. In addition, the first retaining element and the second retaining element each include a piezoelectric driving element, the driving element of the first retaining element and the driving element of the second retaining element being configured to move the functional element in accordance with electric excitation.
Information query
Patent Agency Ranking
0/0