Invention Grant
US08379338B2 System, method, and apparatus for performing metrology on patterned media disks with test pattern areas
有权
用于在具有测试图案区域的图案化介质盘上执行度量的系统，方法和装置
- Patent Title: System, method, and apparatus for performing metrology on patterned media disks with test pattern areas
- Patent Title (中): 用于在具有测试图案区域的图案化介质盘上执行度量的系统，方法和装置
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Application No.: US12871156Application Date: 2010-08-30
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Publication No.: US08379338B2Publication Date: 2013-02-19
- Inventor: Yoshiteru Katsumura
- Applicant: Yoshiteru Katsumura
- Applicant Address: NL Amsterdam
- Assignee: HGST Netherlands B.V.
- Current Assignee: HGST Netherlands B.V.
- Current Assignee Address: NL Amsterdam
- Main IPC: G11B27/36
- IPC: G11B27/36
Abstract:
Techniques for performing metrology on magnetic media disk formations that are arranged in curvilinear patterns are disclosed. Small integrated test patterns having rectangular periodicity are integrated among the concentric circles of patterned media formations. The test patterns cover only very small areas of the disk so as to not significantly affect disk capacity. The periodicity of the test patterns allows their formations to be more readily measured by metrology technology than those having a curvilinear periodicity.
Public/Granted literature
- US20100321813A1 SYSTEM, METHOD, AND APPARATUS FOR PERFORMING METROLOGY ON PATTERNED MEDIA DISKS WITH TEST PATTERN AREAS Public/Granted day:2010-12-23
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