Invention Grant
US08381311B2 Method for examining a test sample using a scanning probe microscope, measurement system and a measuring probe system
有权
使用扫描探针显微镜,测量系统和测量探针系统检查测试样品的方法
- Patent Title: Method for examining a test sample using a scanning probe microscope, measurement system and a measuring probe system
- Patent Title (中): 使用扫描探针显微镜,测量系统和测量探针系统检查测试样品的方法
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Application No.: US12600289Application Date: 2008-05-16
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Publication No.: US08381311B2Publication Date: 2013-02-19
- Inventor: Torsten Jähnke
- Applicant: Torsten Jähnke
- Applicant Address: DE
- Assignee: JPK Instruments AG
- Current Assignee: JPK Instruments AG
- Current Assignee Address: DE
- Agency: Schmeiser, Olsen & Watts, LLP
- Priority: DE102007023435 20070516
- International Application: PCT/DE2008/000824 WO 20080516
- International Announcement: WO2008/138329 WO 20081120
- Main IPC: G01Q10/00
- IPC: G01Q10/00

Abstract:
The invention relates to a method and to a device for examining a test sample using a scanning probe microscope. According to the method a first and a second measurement using a scanning probe microscope are carried out on the test sample using a measuring probe system in which a measuring probe and another measuring probe are formed on a common measuring probe receptacle. During the first measurement, in relation to the test sample, the measuring probe is held in a first measurement position and the other measuring probe is held in another non-measurement position, and the test sample is examined with the measuring probe using a scanning probe microscope. After the first measurement, by displacing in relation to the test sample, the measuring probe is displaced from the measurement position into a non-measurement position and the other measuring probe from the other non-measurement position into another measurement position. During the second measurement, in relation to the test sample, the measuring probe is held in the non-measurement position and the other measuring probe is held in the other measurement position, and the test sample is examined with the other measuring probe using a scanning probe microscope. The invention also relates to a measuring sensor system of a scanning probe microscope.
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