Invention Grant
- Patent Title: Wide area atmosphere pressure plasma jet apparatus
- Patent Title (中): 广域大气压等离子体喷射装置
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Application No.: US12501557Application Date: 2009-07-13
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Publication No.: US08381678B2Publication Date: 2013-02-26
- Inventor: Chen-Der Tsai , Wen-Tung Hsu , Chin-Jyi Wu , Chih-Wei Chen
- Applicant: Chen-Der Tsai , Wen-Tung Hsu , Chin-Jyi Wu , Chih-Wei Chen
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Priority: TW97151854A 20081231
- Main IPC: C23C16/50
- IPC: C23C16/50 ; C23F1/00 ; H01L21/306 ; H01J7/24

Abstract:
A wide area atmospheric pressure plasma jet apparatus including a transmission mechanism, a plasma housing and two plasma-generating devices is provided. The transmission mechanism includes a rotation output end that has a center axis. The plasma housing has an opening. The plasma housing further has a air-attracting hole near the rotation output end and extended from an outer wall of the plasma housing to the interior of the plasma housing, so that the heat of the plasma housing can be dissipated due to the generated gas circulation. The plasma-generating devices are disposed within the plasma housing and connected with the rotation output end. Each of the plasma-generating devices has a plasma nozzle located at the opening and tilts from the center axis. When the rotation output end drives the plasma-generating devices to rotate, two plasma beams are obliquely ejected from the plasma nozzle and the plasma processing area is increased.
Public/Granted literature
- US20100164353A1 WIDE AREA ATMOSPHERE PRESSURE PLASMA JET APPARATUS Public/Granted day:2010-07-01
Information query
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