Invention Grant
- Patent Title: Advanced FI blade for high temperature extraction
- Patent Title (中): 高级FI刀片用于高温提取
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Application No.: US12261574Application Date: 2008-10-30
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Publication No.: US08382180B2Publication Date: 2013-02-26
- Inventor: Dinesh Kanawade , Craig R. Metzner , Chandrasekhar Balasubramanyam
- Applicant: Dinesh Kanawade , Craig R. Metzner , Chandrasekhar Balasubramanyam
- Applicant Address: US CA Santa Clara
- Assignee: Applied Material, Inc.
- Current Assignee: Applied Material, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: B66F19/00
- IPC: B66F19/00

Abstract:
An apparatus for transferring substrates in a processing system where the substrate is exposed to high temperatures is provided. In one embodiment a blade for transporting a substrate is provided. The blade comprises a base having an arcuate lateral shoulder, a first finger extending outward from and perpendicular to the base, a second finger extending outward from the base and parallel to and spaced-apart from the first finger, a first support tab configured to support the substrate and positioned along the arcuate lateral shoulder, a second support tab configured to support the substrate and coupled with the first finger, and a third support tab configured to support the substrate coupled with the second finger, wherein the arcuate lateral shoulder extends from an outer edge of the first finger to an outer edge of the second finger.
Public/Granted literature
- US20090110520A1 ADVANCED FI BLADE FOR HIGH TEMPERATURE EXTRACTION Public/Granted day:2009-04-30
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