Invention Grant
- Patent Title: Single disc vapor lubrication
- Patent Title (中): 单盘蒸汽润滑
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Application No.: US10644054Application Date: 2003-08-20
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Publication No.: US08382902B2Publication Date: 2013-02-26
- Inventor: Michael Joseph Stirniman , Paul Stephen McLeod
- Applicant: Michael Joseph Stirniman , Paul Stephen McLeod
- Assignee: Seagate Technology LLC
- Current Assignee: Seagate Technology LLC
- Main IPC: C23C16/00
- IPC: C23C16/00
Abstract:
Apparatus and method for vapor deposition of a uniform thickness thin film of lubricant on at least one surface of a disk-shaped substrate. The invention has particular utility in depositing thin films of polymeric lubricants onto disc-shaped substrates in the manufacture of magnetic and MO recording media.
Public/Granted literature
- US20040112291A1 Single disc vapor lubrication Public/Granted day:2004-06-17
Information query
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