Invention Grant
- Patent Title: Film forming apparatus, film forming system, film forming method, and method of manufacturing electronic device or organic electroluminescence element
- Patent Title (中): 成膜装置,成膜系统,成膜方法以及电子器件或有机电致发光元件的制造方法
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Application No.: US11991475Application Date: 2006-09-05
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Publication No.: US08383194B2Publication Date: 2013-02-26
- Inventor: Tadahiro Ohmi , Takaaki Matsuoka , Shozo Nakayama , Hironori Ito
- Applicant: Tadahiro Ohmi , Takaaki Matsuoka , Shozo Nakayama , Hironori Ito
- Applicant Address: JP Miyagi JP Tokyo
- Assignee: Tohoku University,Tokyo Electron Limited
- Current Assignee: Tohoku University,Tokyo Electron Limited
- Current Assignee Address: JP Miyagi JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JP2005-258043 20050906
- International Application: PCT/JP2006/317499 WO 20060905
- International Announcement: WO2007/029671 WO 20070315
- Main IPC: B05D5/06
- IPC: B05D5/06 ; B05C9/06

Abstract:
To provide a film forming apparatus capable of using an expensive organic EL raw material without waste and uniformly forming an organic EL film over a long period of time and a jig therefor.A plurality of ejection vessels are provided for a single raw material container section. A switcher is provided for carrying out switching from a piping system, which evaporates an organic EL raw material in the raw material container section and supplies it along with a carrier gas to one of the ejection vessels, to a piping system for another ejection vessel. In this manner, by supplying the organic EL raw material from the single raw material container section to the plurality of ejection vessels by switching, the use efficiency of the organic EL raw material can be improved.
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