Invention Grant
- Patent Title: Pattern exposure method, conductive film producing method, and conductive film
- Patent Title (中): 图案曝光方法,导电膜制造方法和导电膜
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Application No.: US12790378Application Date: 2010-05-28
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Publication No.: US08383329B2Publication Date: 2013-02-26
- Inventor: Toyomi Matsuda , Makoto Sutou , Tomonori Baba , Daisuke Mitsuhashi
- Applicant: Toyomi Matsuda , Makoto Sutou , Tomonori Baba , Daisuke Mitsuhashi
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2009-131487 20090529
- Main IPC: G03F7/26
- IPC: G03F7/26

Abstract:
There are provided a pattern exposure method, a conductive film producing method, and a conductive film, wherein a photosensitive material is subjected to a proximity exposure through a photomask disposed with a proximity gap of 70 to 200 μm, and thereby is exposed in the mask pattern periodically in the conveying direction to obtain a conductive film. The conductive film has a plurality of conductive portions of first and second conductive thin metal wires and a plurality of opening portions. A side of each thin metal wire has a protrusion extending toward the opening portion from a virtual line representing a designed width of the thin metal wire, and the protruding amount of the protrusion is 1/25 to 1/6 of the designed width.
Public/Granted literature
- US20100300729A1 PATTERN EXPOSURE METHOD, CONDUCTIVE FILM PRODUCING METHOD, AND CONDUCTIVE FILM Public/Granted day:2010-12-02
Information query
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