Invention Grant
US08383457B2 Semiconductor device and method of forming interposer frame over semiconductor die to provide vertical interconnect
有权
半导体器件和在半导体管芯上形成插入器框架以提供垂直互连的方法
- Patent Title: Semiconductor device and method of forming interposer frame over semiconductor die to provide vertical interconnect
- Patent Title (中): 半导体器件和在半导体管芯上形成插入器框架以提供垂直互连的方法
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Application No.: US12875981Application Date: 2010-09-03
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Publication No.: US08383457B2Publication Date: 2013-02-26
- Inventor: Reza A. Pagaila , Seng Guan Chow , Seung Uk Yoon
- Applicant: Reza A. Pagaila , Seng Guan Chow , Seung Uk Yoon
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC, Ltd.
- Current Assignee: STATS ChipPAC, Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins & Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A semiconductor device has a first semiconductor die mounted over a carrier. An interposer frame has an opening in the interposer frame and a plurality of conductive pillars formed over the interposer frame. The interposer is mounted over the carrier and first die with the conductive pillars disposed around the die. A cavity can be formed in the interposer frame to contain a portion of the first die. An encapsulant is deposited through the opening in the interposer frame over the carrier and first die. Alternatively, the encapsulant is deposited over the carrier and first die and the interposer frame is pressed against the encapsulant. Excess encapsulant exits through the opening in the interposer frame. The carrier is removed. An interconnect structure is formed over the encapsulant and first die. A second semiconductor die can be mounted over the first die or over the interposer frame.
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