Invention Grant
- Patent Title: Method for formation of tips
- Patent Title (中): 形成尖端的方法
-
Application No.: US12675138Application Date: 2008-08-29
-
Publication No.: US08383498B2Publication Date: 2013-02-26
- Inventor: Simone Severi
- Applicant: Simone Severi
- Applicant Address: BE Leuven
- Assignee: IMEC
- Current Assignee: IMEC
- Current Assignee Address: BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- International Application: PCT/EP2008/061434 WO 20080829
- International Announcement: WO2009/027528 WO 20090305
- Main IPC: H01L21/22
- IPC: H01L21/22 ; H01L21/31

Abstract:
The present invention provides a method (80) for manufacturing a semiconductor tip. The method comprises obtaining (81) a substrate provided with a layer of tip material, providing (82) a doping profile in the layer of tip material, the doping profile comprising a tapered-shaped region of a first dopant concentration, undoped or lightly doped, e.g. having a dopant concentration of 1017 cm−3 or lower, surrounded by a region of a second dopant concentration, highly doped, e.g. having a dopant concentration above 1017 cm−3, the first dopant concentration being lower than the second dopant concentration, and isotropically etching (83) the layer of tip material by using an etch chemistry for which the etch rate of tip material with the second dopant concentration is substantially higher than the etch rate of the tip material with the first dopant concentration.
Public/Granted literature
- US20100295159A1 Method for Formation of Tips Public/Granted day:2010-11-25
Information query
IPC分类: