Invention Grant
- Patent Title: Nonvolatile memory device and manufacturing method
- Patent Title (中): 非易失存储器件及其制造方法
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Application No.: US12745190Application Date: 2008-11-06
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Publication No.: US08384061B2Publication Date: 2013-02-26
- Inventor: Takumi Mikawa , Kenji Tominaga , Kazuhiko Shimakawa , Ryotaro Azuma
- Applicant: Takumi Mikawa , Kenji Tominaga , Kazuhiko Shimakawa , Ryotaro Azuma
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2007-308469 20071129
- International Application: PCT/JP2008/003214 WO 20081106
- International Announcement: WO2009/069252 WO 20090604
- Main IPC: H01L27/26
- IPC: H01L27/26 ; H01L29/8605 ; H01L21/02

Abstract:
A nonvolatile memory device of the present invention includes a substrate (1), first wires (3), first resistance variable elements (5) and lower electrodes (6) of first diode elements which are filled in first through-holes (4), respectively, second wires (11) which cross the first wires 3 perpendicularly to the first wires 3, respectively, and each of which includes a semiconductor layer (7) of a first diode elements, a conductive layer (8) and a semiconductor layer (10) of a second diode elements which are stacked together in this order, second resistance variable elements (16) and upper electrodes (14) of second diode elements which are filled into second through holes (13), respectively, and third wires (17), and the conductive layer (8) of each second wires (11) also serves as the upper electrode of the first diode elements (9) and the lower electrode of the second diode elements (15).
Public/Granted literature
- US20100258779A1 NONVOLATILE MEMORY DEVICE AND MANUFACTURING MEHTOD THEREOF Public/Granted day:2010-10-14
Information query
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