Invention Grant
- Patent Title: Oxide semiconductor device
- Patent Title (中): 氧化物半导体器件
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Application No.: US12846603Application Date: 2010-07-29
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Publication No.: US08384079B2Publication Date: 2013-02-26
- Inventor: Shunpei Yamazaki , Miyuki Hosoba , Junichiro Sakata , Hideaki Kuwabara
- Applicant: Shunpei Yamazaki , Miyuki Hosoba , Junichiro Sakata , Hideaki Kuwabara
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Fish & Richardson P.C.
- Priority: JP2009-180077 20090731
- Main IPC: H01L29/12
- IPC: H01L29/12

Abstract:
An object is to provide a semiconductor device having a structure in which parasitic capacitance between wirings can be efficiently reduced. In a bottom gate thin film transistor using an oxide semiconductor layer, an oxide insulating layer used as a channel protection layer is formed above and in contact with part of the oxide semiconductor layer overlapping with a gate electrode layer, and at the same time an oxide insulating layer covering a peripheral portion (including a side surface) of the stacked oxide semiconductor layer is formed. Further, a source electrode layer and a drain electrode layer are formed in a manner such that they do not overlap with the channel protection layer. Thus, a structure in which an insulating layer over the source electrode layer and the drain electrode layer is in contact with the oxide semiconductor layer is provided.
Public/Granted literature
- US20110031491A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2011-02-10
Information query
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