Invention Grant
- Patent Title: Semiconductor device and method of manufacturing same
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Application No.: US12627060Application Date: 2009-11-30
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Publication No.: US08384160B2Publication Date: 2013-02-26
- Inventor: Kazuhiro Onishi , Kazuhiro Tsukamoto
- Applicant: Kazuhiro Onishi , Kazuhiro Tsukamoto
- Applicant Address: JP Tokyo
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2008-335656 20081229
- Main IPC: H01L21/70
- IPC: H01L21/70

Abstract:
To provide a semiconductor device and a method of manufacturing the same capable of suppressing, when a plurality of MIS transistors having different absolute values of threshold voltage is used, the reduction of the drive current of a MIS transistor having a greater absolute value of threshold voltage. The threshold voltage of a second nMIS transistor is greater than the threshold voltage of a first nMIS transistor and the sum of the concentration of lanthanum atom and the concentration of magnesium atom in a second nMIS high-k film included in the second nMIS transistor is lower than the sum of the concentration of lanthanum atom and the concentration of magnesium atom in a first nMIS high-k film included in the first nMIS transistor.
Public/Granted literature
- US20100164007A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME Public/Granted day:2010-07-01
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