Invention Grant
- Patent Title: Passivation of integrated circuits containing ferroelectric capacitors and hydrogen barriers
- Patent Title (中): 钝化包含铁电电容器和氢屏障的集成电路
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Application No.: US12717604Application Date: 2010-03-04
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Publication No.: US08384190B2Publication Date: 2013-02-26
- Inventor: Scott R. Summerfelt , Ted S. Moise , Gul B. Basim
- Applicant: Scott R. Summerfelt , Ted S. Moise , Gul B. Basim
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Rose Alyssa Keagy; Wade J. Brady, III; Frederick J. Telecky, Jr.
- Main IPC: H01L21/02
- IPC: H01L21/02

Abstract:
An integrated circuit that includes a logic region, a buffer region, and a ferroelectric capacitor region that contains ferroelectric capacitors. The integrated circuit also includes a hydrogen diffusion barrier film that overlies ferroelectric capacitors and also overlies a buffer region located between a ferroelectric capacitor region and a logic region. However, the hydrogen diffusion barrier film is removed from a portion of the logic region. Moreover, a method for forming a hydrogen barrier layer that overlies ferroelectric capacitors and a buffer region but is removed from a portion of the logic region.
Public/Granted literature
- US20100224961A1 PASSIVATION OF INTEGRATED CIRCUITS CONTAINING FERROELECTRIC CAPACITORS AND HYDROGEN BARRIERS Public/Granted day:2010-09-09
Information query
IPC分类: