Invention Grant
- Patent Title: Electroactive polymer actuator and method of manufacturing the same
- Patent Title (中): 电动聚合物致动器及其制造方法
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Application No.: US12855785Application Date: 2010-08-13
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Publication No.: US08384271B2Publication Date: 2013-02-26
- Inventor: Jong-Oh Kwon , Seung-Tae Choi
- Applicant: Jong-Oh Kwon , Seung-Tae Choi
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2009-0110503 20091116
- Main IPC: H01L41/047
- IPC: H01L41/047

Abstract:
A multilayer electroactive polymer actuator and a method of manufacturing the same. The multilayer electroactive polymer actuator is divided into an actuating area and a non-actuating area. A plurality of driving electrodes, each formed on a side of the respective polymer layer to correspond to the actuating area. A plurality of extension electrodes connected to the driving electrodes and a common electrode for vertically connecting the extension electrodes are formed to correspond to the non-actuating area. A via hole is formed through the plurality of non-actuating layers and has a diameter which increases in a stepwise manner upwards. The common electrode is formed in the via hole. The driving electrode includes an alloy of aluminum and copper. The extension electrode is formed of material having a small reactivity with respect to laser as compared to the reactivity of the polymer layer.
Public/Granted literature
- US20110116171A1 ELECTROACTIVE POLYMER ACTUATOR AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2011-05-19
Information query
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