Invention Grant
- Patent Title: Micromechanical assembly having a displaceable component
- Patent Title (中): 具有可移位部件的微机械组件
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Application No.: US12893778Application Date: 2010-09-29
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Publication No.: US08384975B2Publication Date: 2013-02-26
- Inventor: Tjalf Pirk , Stefan Pinter , Joachim Fritz , Christoph Friese
- Applicant: Tjalf Pirk , Stefan Pinter , Joachim Fritz , Christoph Friese
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102009045720 20091015
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
A micromechanical assembly having a mounting, at least one stator electrode comb, which is fixedly placed on the mounting, having at least two stator electrode fingers, whose central longitudinal axes are on a central plane of the stator electrode comb, at least one actuator electrode comb having at least two actuator electrode fingers, and a displaceable component, which is coupled to the at least one actuator electrode comb so that the displaceable component is displaceable in relation to the mounting at least in one first displacement direction using a nonzero operating voltage, which is applied between the at least two stator electrode fingers and the at least two actuator electrode fingers, the first displacement direction having one first nonzero directional component perpendicular to the central plane.
Public/Granted literature
- US20110090551A1 Micromechanical assembly having a displaceable component Public/Granted day:2011-04-21
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