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US08385714B2 Methods for visually inspecting interferometric modulators for defects 失效
视觉检测干涉式调制器缺陷的方法

Methods for visually inspecting interferometric modulators for defects
Abstract:
A method is provided for visual inspection of an array of interferometric modulators in various driven states. This method may include driving multiple columns or rows of interferometric modulators via a single test pad or test lead, such as test pad, and then observing the array for discrepancies between the expected optical output and the actual optical output of the array. This method may particularly include, for example, driving a set of non-adjacent rows or columns to a state different from the intervening rows or columns and then observing the optical output of the array.
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