Invention Grant
US08386083B2 Systems and methods for updating valve cracking current in mass flow controllers
有权
在质量流量控制器中更新阀门开启电流的系统和方法
- Patent Title: Systems and methods for updating valve cracking current in mass flow controllers
- Patent Title (中): 在质量流量控制器中更新阀门开启电流的系统和方法
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Application No.: US12139633Application Date: 2008-06-16
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Publication No.: US08386083B2Publication Date: 2013-02-26
- Inventor: Junhua Ding
- Applicant: Junhua Ding
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: McDermott Will & Emery LLP
- Main IPC: G05D7/06
- IPC: G05D7/06 ; G06F15/18

Abstract:
A valve system for a mass flow controller that controls a flow rate of a fluid is disclosed. The valve system includes a valve movable between an open position and a closed position to adjust the flow rate of the fluid to a desired set point, and a valve controller. The valve controller sends a valve current through the valve, so as to adjust the flow rate of the fluid until an actual measured flow rate of the fluid substantially equals the desired set point. The valve controller monitors the valve current and the flow rate when the valve is moving to the closed position, determines a value of the valve current when the fluid has near-zero flow rate, and updates the valve cracking current for a next run, by setting the updated valve cracking current to the value of the valve current at the near-zero flow rate.
Public/Granted literature
- US20100036534A1 Systems and Methods for Updating Valve Cracking Current in Mass Flow Controllers Public/Granted day:2010-02-11
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