Invention Grant
- Patent Title: MEMS sensor
- Patent Title (中): MEMS传感器
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Application No.: US12606606Application Date: 2009-10-27
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Publication No.: US08387459B2Publication Date: 2013-03-05
- Inventor: Goro Nakatani
- Applicant: Goro Nakatani
- Applicant Address: JP Kyoto
- Assignee: Rohm Co., Ltd.
- Current Assignee: Rohm Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Rabin & Berdo, P.C.
- Priority: JP2008-277134 20081028
- Main IPC: G01P15/12
- IPC: G01P15/12

Abstract:
The MEMS sensor according to the present invention includes: a substrate; a supporting portion provided on one surface of the substrate; a beam, supported by the supporting portion, having a movable portion opposed to the surface of the substrate through a space; a resistor formed on at least the movable portion of the beam; a weight arranged on a side of the beam opposite to the substrate; and a coupling portion, made of a metallic material, coupling the beam and the weight with each other.
Public/Granted literature
- US20100101324A1 MEMS SENSOR Public/Granted day:2010-04-29
Information query
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