Invention Grant
US08387529B2 Stamps with micrometer-and nanometer-scale features and methods of fabrication thereof 有权
具有微米和纳米尺度特征的印模及其制造方法

Stamps with micrometer-and nanometer-scale features and methods of fabrication thereof
Abstract:
Stamps and methods of making stamps for applications in anti-counterfeiting and authentication. The stamps are relatively small in size and feature nanoscale and microscale identification regions and features. High throughput manufacturing and high resolution methods are used to make the stamps including electron beam lithography and optical lithography. Anti-fouling coatings can be applied.
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