Invention Grant
US08387854B2 Method for mounting a three-axis MEMS device with precise orientation
有权
用于安装精确定向的三轴MEMS器件的方法
- Patent Title: Method for mounting a three-axis MEMS device with precise orientation
- Patent Title (中): 用于安装精确定向的三轴MEMS器件的方法
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Application No.: US13402210Application Date: 2012-02-22
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Publication No.: US08387854B2Publication Date: 2013-03-05
- Inventor: Noureddine Hawat
- Applicant: Noureddine Hawat
- Applicant Address: US MA Andover
- Assignee: Memsic, Inc.
- Current Assignee: Memsic, Inc.
- Current Assignee Address: US MA Andover
- Agency: Preti Flaherty Beliveau & Pachios LLP
- Main IPC: B23K31/02
- IPC: B23K31/02

Abstract:
This invention uses surface tension to align a z-axis MEMS sensing device that is mounted onto a substrate or lead frame oriented in an xy-plane. According to the teachings of the present invention, the height of the z-axis sensing device is less than or substantially equal to its width (y-dimension) while the length of the device in the longitudinal direction (x-dimension) is greater than either of the y- or z-dimensions. As a result, instead of being thin and tall like a wall, which configuration is extremely difficult to align vertically, the elongate z-axis sensing device is mounted on a short z-axis, making it easier to align vertically.
Public/Granted literature
- US20120217286A1 METHOD FOR MOUNTING A THREE-AXIS MEMS DEVICE WITH PRECISE ORIENTATION Public/Granted day:2012-08-30
Information query
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