A vacuum chuck comprises a main body including a support projection and a vacuum groove arranged in a lattice form on the top surface thereof, an installation space, a vacuum space, a filter space. The main body further includes an inlet that communicates with the installation space and an outlet that communicates with the vacuum space. An air saving valve B, a vacuum sensor S, a vacuum generator V and a filter F are installed in the installation space, vacuum space and filter space of the main body. A pressure gauge and a vacuum gauge that are mounted on the front side and communicate with the inlet and the vacuum space respectively. A main body cover that is air-tightly coupled to the lower part of the main body, and a filter cover that is air-tightly coupled to the lower part of the filter space.